Publications

@inproceedings{TUW-228686,

title = {Coupled Simulation to Determine Across Wafer Variations for Electrical and Reliability Parameters of Through-Silicon VIAs},

author = {Eberhard Baer and P. Evanschitzky and J. Lorenz and Frederic Roger and R. Minixhofer and Lado Filipovic and Roberto Orio and Siegfried Selberherr},

url = {http://www.iue.tuwien.ac.at/pdf/ib_2013/CP2014_Filipovic_4.pdf},

year  = {2014},

date = {2014-01-01},

booktitle = {Book of Abstracts},

note = {European Workshop on Materials for Advanced Metallization (MAM), Chemnitz, Germany; 2014-03-02 -- 2014-03-05},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{TUW-228656,

title = {Process and Performance of Copper TSVs},

author = {Lado Filipovic and Roberto Orio and Siegfried Selberherr},

url = {http://www.iue.tuwien.ac.at/pdf/ib_2013/CP2013_Filipovic_3.pdf},

year  = {2014},

date = {2014-01-01},

booktitle = {Conference Proceedings of the Tenth Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits},

pages = {1--2},

note = {Workshop of the Thematic Network on Silicon On Insulator Technology, Devices and Circuits (EUROSOI), Tarragona, Spain; 2014-01-27 -- 2014-01-29},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{TUW-219746,

title = {Modeling the Growth of Thin SnO2 Films using Spray Pyrolysis Deposition},

author = {Lado Filipovic and Siegfried Selberherr and G. C. Mutinati and E. Brunet and S. Steinhauer and Anton Köck and Jordi Teva and J. Kraft and Joerg Siegert and F. Schrank and Christian Gspan and Werner Grogger},

url = {http://www.iue.tuwien.ac.at/pdf/ib_2013/CP2013_Filipovic_2.pdf},

doi = {10.1109/SISPAD.2013.6650611},

isbn = {978-1-4673-5733-3},

year  = {2013},

date = {2013-01-01},

booktitle = {Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)},

pages = {208--211},

note = {International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Glasgow, Scotland, United Kingdom; 2013-09-03 -- 2013-09-05},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{TUW-219229,

title = {Modeling Spray Pyrolysis Deposition},

author = {Lado Filipovic and Siegfried Selberherr and G. C. Mutinati and E. Brunet and S. Steinhauer and Anton Köck and Jordi Teva and J. Kraft and Joerg Siegert and F. Schrank},

url = {http://www.iue.tuwien.ac.at/pdf/ib_2013/CP2013_Filipovic_1.pdf},

isbn = {978-988-19252-8-2},

year  = {2013},

date = {2013-01-01},

booktitle = {Proceedings of the World Congress on Engineering (WCE) Vol II},

pages = {987--992},

note = {World Congress on Engineering (WCE), London, UK; 2013-07-03 -- 2013-07-05},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{TUW-217740,

title = {Impact of Bosch Scallops Dimensions on Stress of an Open Through Silicon Via Technology},

author = {Anderson P. Singulani and Hajdin Ceric and Lado Filipovic and Erasmus Langer},

url = {http://www.iue.tuwien.ac.at/pdf/ib_2012/CP2013_Singulani_1.pdf},

doi = {10.1109/EuroSimE.2013.6529938},

isbn = {978-1-4673-6137-8},

year  = {2013},

date = {2013-01-01},

booktitle = {Proceedings of the IEEE 14th International Conference on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EurSimE)},

note = {International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, Poland; 2013-04-14 -- 2013-04-17},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{TUW-209742,

title = {Simulations of Local Oxidation Nanolithography by AFM Based on the Generated Electric Field},

author = {Lado Filipovic and Siegfried Selberherr},

url = {http://www.iue.tuwien.ac.at/pdf/ib_2012/CP2012_Filipovic_1.pdf},

isbn = {978-0-615-71756-2},

year  = {2012},

date = {2012-01-01},

booktitle = {Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)},

pages = {189--192},

note = {International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Denver, CO, USA; 2012-09-05 -- 2012-09-07},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{TUW-209877,

title = {Electric Field Based Simulations of Local Oxidation Nanolithography using Atomic Force Microscopy in a Level Set Environment},

author = {Lado Filipovic and Siegfried Selberherr},

url = {http://www.iue.tuwien.ac.at/pdf/ib_2012/CP2012_Filipovic_2.pdf},

doi = {10.1149/04901.0265ecst},

isbn = {978-1-56677-990-6},

year  = {2012},

date = {2012-01-01},

booktitle = {ECS Transactions},

pages = {265--272},

publisher = {49},

address = {1},

note = {Intl. Symposium on Microelectronics Technology and Devices (SBMicro), Brasilia, Brazil; 2012-08-30 -- 2012-09-02},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{TUW-208672,

title = {Simulation of Silicon Nanopatterning Using nc-AFM},

author = {Lado Filipovic and Siegfried Selberherr},

url = {http://www.iue.tuwien.ac.at/pdf/ib_2011/CP2012_Filipovic_1.pdf},

year  = {2012},

date = {2012-01-01},

booktitle = {Abstracts 15th International Conference on non-contact Atomic Force Microscopy (nc-AFM)},

pages = {108},

note = {International Conference on non-contact Atomic Force Microscopy, Cesky Krumlov; 2012-07-01 -- 2012-07-05},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{TUW-208128,

title = {Towards a Free Open Source Process and Device Simulation Framework},

author = {Josef Weinbub and Karl Rupp and Lado Filipovic and Alexander Makarov and Siegfried Selberherr},

url = {http://www.iue.tuwien.ac.at/pdf/ib_2011/CP2012_Weinbub_1.pdf},

year  = {2012},

date = {2012-01-01},

booktitle = {Book of Abstracts of the International Workshop on Computational Electronics (IWCE)},

pages = {141--142},

note = {International Workshop on Computational Electronics (IWCE), Madison, WI, USA; 2012-05-22 -- 2012-05-25},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{TUW-198951,

title = {A Level Set Simulator for Nanooxidation using Non-Contact Atomic Force Microscopy},

author = {Lado Filipovic and Siegfried Selberherr},

url = {http://www.iue.tuwien.ac.at/pdf/ib_2011/CP2011_Filipovic_2.pdf},

doi = {10.1109/SISPAD.2011.6035031},

isbn = {978-1-61284-418-3},

year  = {2011},

date = {2011-01-01},

booktitle = {Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)},

pages = {307--310},

note = {International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Osaka, Japan; 2011-09-08 -- 2011-09-10},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{TUW-198828,

title = {A Two-Dimensional Lorentzian Distribution for an Atomic Force Microscopy Simulator},

author = {Lado Filipovic and Siegfried Selberherr},

url = {http://www.iue.tuwien.ac.at/pdf/ib_2011/CP2011_Filipovic_1.pdf},

year  = {2011},

date = {2011-01-01},

booktitle = {Abstracts IMACS Seminar on Monte Carlo Methods (MCM)},

pages = {30},

note = {Seminar on Monte Carlo Methods (MCM), Borovets; 2011-08-29 -- 2011-09-02},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{TUW-197386,

title = {A Monte Carlo Simulator for Non-Contact Atomic Force Microscopy},

author = {Lado Filipovic and Mihail Nedjalkov and Siegfried Selberherr},

url = {http://www.iue.tuwien.ac.at/pdf/ib_2010/CP2011_Filipovic_3.pdf},

year  = {2011},

date = {2011-01-01},

booktitle = {Abstracts Intl. Conf. on Large-Scale Scientific Computations},

pages = {42--43},

note = {International Conference on Large-Scale Scientific Computations (LSSC), Sozopol, Bulgaria; 2011-06-06 -- 2011-06-10},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{TUW-197125,

title = {A Simulator for Local Anodic Oxidation of Silicon Surfaces},

author = {Lado Filipovic and Hajdin Ceric and Johann Cervenka and Siegfried Selberherr},

url = {http://www.iue.tuwien.ac.at/pdf/ib_2010/CP2011_Filipovic_2.pdf},

doi = {10.1109/CCECE.2011.6030543},

isbn = {978-1-4244-9789-8},

year  = {2011},

date = {2011-01-01},

booktitle = {Proceedings of the 24th Canadian Conference on Electrical and Computer Engineering (CCECE 2011)},

pages = {695--698},

note = {IEEE Canadian Conference on Electrical and Computer Engineering (CCECE), Niagara Falls, Canada; 2011-05-08 -- 2011-05-11},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{TUW-195841,

title = {Parallelization Strategy for Hierarchical Run Length Encoded Data Structures},

author = {Lado Filipovic and Otmar Ertl and Siegfried Selberherr},

url = {http://www.iue.tuwien.ac.at/pdf/ib_2010/CP2011_Filipovic_1.pdf},

doi = {10.2316/P.2011.719-045},

isbn = {978-0-88986-864-9},

year  = {2011},

date = {2011-01-01},

booktitle = {Proceedings of the IASTED International Conference on Parallel and Distributed Computing and Networks (PDCN 2011)},

pages = {131--138},

note = {IASTED International Conference on Parallel and Distributed Computing and Networks (PDCN 2011), Innsbruck; 2011-02-15 -- 2011-02-17},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{TUW-188068,

title = {Three-Dimensional Simulation of Focused Ion Beam Processing Using the Level Set Method},

author = {Otmar Ertl and Lado Filipovic and Siegfried Selberherr},

url = {http://www.iue.tuwien.ac.at/pdf/ib_2010/CP2010_Ertl_1.pdf},

doi = {10.1109/SISPAD.2010.5604573},

isbn = {978-1-4244-7700-5},

year  = {2010},

date = {2010-01-01},

booktitle = {Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)},

pages = {49--52},

note = {International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Bologna, Italy; 2010-09-06 -- 2010-09-08},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{5393551,

title = {A 10-bit low-power SAR ADC with a tunable series attenuation capacitor},

author = {Lado Filipovic and Leonard MacEachern},

doi = {10.1109/ICM.2008.5393551},

year  = {2008},

date = {2008-01-01},

booktitle = {Proceedings of the International Conference on Microelectronics},

pages = {399--402},

note = {International Conference on Microelectronics, Sharjah, United Arab Emirates; 2008-12-14--2008-12-17},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{filipovic2023iwcn,

title = {Process Simulation in Micro- and Nano-electronics},

author = {Lado Filipovic and Tobias Reiter and Xaver Klemenschits and Sabine Leroch and Robert Stella and Oskar Baumgartner and and Andreas Hössinger},

url = {https://iwcn2023.uab.es/abstract/6.pdf},

booktitle = { IWCN - International Workshop on Computational Nanotechnology (2023)},

note = {Invited},

keywords = {},

pubstate = {forthcoming},

tppubtype = {inproceedings}

}