Publications

105 entries « 1 of 2 »

Journal Articles

105.

Theresia Knobloch; Burkay Uzlu; Yury Yu. Illarionov; Zhenxing Wang; Martin Otto; Lado Filipovic; Michael Waltl; Daniel Neumaier; Max C. Lemme; Tibor Grasser

Improving stability in two-dimensional transistors with amorphous gate oxides by Fermi-level tuning Journal Article

In: Nature Electronics, vol. 5, pp. 356–366, 2022.

Links | BibTeX

104.

Lado Filipovic; Tibor Grasser

Editorial for the Special Issue on Miniaturized Transistors, Volume II Journal Article

In: Micromachines, vol. 13, iss. 4, no. 601, pp. 4, 2022.

Links | BibTeX

103.

Michael Waltl; Theresia Knobloch; Konstantinos Tselios; Lado Filipovic; Bernhard stampfer; Yoanlys Hernandez; Dominik Waldhör; Yury Yu. Illarionov; Ben Kaczer; Tibor Grasser

Perspective of 2D Integrated Electronic Circuits: Scientific Pipe Dream or Disruptive Technology? Journal Article

In: Advanced Materials, vol. 2022, no. 2201082, 2022.

Links | BibTeX

102.

Tobias Reiter; Xaver Klemenschits; Lado Filipovic

Impact of Plasma Induced Damage on the Fabrication of 3D NAND Flash Memory Journal Article

In: Solid-State Electronics, vol. 192, pp. 108261-1–108261-9, 2022, (invited).

Links | BibTeX

101.

Safari Fatemeh; Mahdi Moradinasab; Udo Schwalke; Lado Filipovic

Superior Sensitivity and Optical Response of Blue Phosphorene and Its Doped Systems for Gas Sensing Applications Journal Article

In: ACS Omega, vol. 6, no. 29, pp. 18770–18781, 2021.

Links | BibTeX

100.

Lado Filipovic

Theoretical Examination of Thermo-Migration in Novel Platinum Microheaters Journal Article

In: Microelectronics Reliability, vol. 123, pp. 114219-1–114219-14, 2021.

Links | BibTeX

99.

Lado Filipovic; Siegfried Selberherr

Microstructure and Granularity Effects in Electromigration Journal Article

In: IEEE Journal of the Electron Devices Society, vol. 9, pp. 476–483, 2021, (invited).

Links | BibTeX

98.

Xaver Klemenschits; Siegfried Selberherr; Lado Filipovic

Geometric Advection and Its Application in the Emulation of High Aspect Ratio Structures Journal Article

In: Computer Methods in Applied Mechanics and Engineering, vol. 386, pp. 114196-1–114196-22, 2021.

Links | BibTeX

97.

Lado Filipovic

A Method for Simulating the Influence of Grain Boundaries and Material Interfaces on Electromigration Journal Article

In: Microelectronics Reliability, vol. 97, pp. 38–52, 2019.

Links | BibTeX

96.

Lado Filipovic; Siegfried Selberherr

Thermo-Electro-Mechanical Simulation of Semiconductor Metal Oxide Gas Sensors Journal Article

In: Materials, vol. 12, no. 15, pp. 2410-1–2410-37, 2019, (invited).

Links | BibTeX

95.

Ayoub Lahlalia; Oliver Le Neel; Ravi Shankar; Siegfried Selberherr; Lado Filipovic

Improved Sensing Capability of Integrated Semiconducting Metal Oxide Gas Sensor Devices Journal Article

In: Sensors, vol. 19, no. 2, pp. 374-1–374-14, 2019.

Links | BibTeX

94.

Lado Filipovic; Tibor Grasser

Editorial for the Special Issue on Miniaturized Transistors Journal Article

In: Micromachines, vol. 10, no. 5, pp. 1–3, 2019.

Links | BibTeX

93.

Lado Filipovic; Ayoub Lahlalia

Review-System-on-Chip SMO Gas Sensor Integration in Advanced CMOS Technology Journal Article

In: Journal of the Electrochemical Society, vol. 165, no. 16, pp. 862–879, 2018.

Links | BibTeX

92.

Xaver Klemenschits; Siegfried Selberherr; Lado Filipovic

Modeling of Gate Stack Patterning for Advanced Technology Nodes: A Review Journal Article

In: Micromachines, vol. 9, no. 12, pp. 631-1–631-31, 2018, (invited).

Links | BibTeX

91.

Ayoub Lahlalia; Lado Filipovic; Siegfried Selberherr

Modeling and Simulation of Novel Semiconducting Metal Oxide Gas Sensors for Wearable Devices Journal Article

In: IEEE Sensors Journal, vol. 18, no. 5, pp. 1960–1970, 2018.

Links | BibTeX

90.

Ayoub Lahlalia; Olivier Le Neel; Ravi Shankar; Shian-Yeu Kam; Lado Filipovic

Electro-Thermal Simulation & Characterization of a Microheater for SMO Gas Sensors Journal Article

In: Journal Of Microelectromechanical Systems, vol. 27, no. 3, pp. 529–537, 2018.

Links | BibTeX

89.

Paul Manstetten; Lado Filipovic; Andreas Hössinger; Josef Weinbub; Siegfried Selberherr

Framework to Model Neutral Particle Flux in Convex High Aspect Ratio Structures using One-Dimensional Radiosity Journal Article

In: Solid-State Electronics, vol. 128, no. 2, pp. 141–147, 2017, (invited).

Links | BibTeX

88.

Lado Filipovic; Siegfried Selberherr

Stress Considerations for System-on-Chip Gas Sensor Integration in CMOS Technology Journal Article

In: IEEE Transactions on Device and Materials Reliability, vol. 16, no. 4, pp. 483–495, 2016.

Links | BibTeX

87.

Lado Filipovic; Siegfried Selberherr

Stress in Three-Dimensionally Integrated Sensor Systems Journal Article

In: Microelectronics Reliability, vol. 61, pp. 3–10, 2016.

Links | BibTeX

86.

Eberhard Baer; P. Evanschitzky; J. Lorenz; Frederic Roger; R. Minixhofer; Lado Filipovic; Roberto Orio; Siegfried Selberherr

Coupled Simulation to Determine the Impact of Across Wafer Variations in Oxide PECVD on Electrical and Reliability Parameters of Through-Silicon Vias Journal Article

In: Microelectronic Engineering, vol. 137, pp. 141–145, 2015.

Links | BibTeX

85.

Lado Filipovic; Siegfried Selberherr

Performance and Stress Analysis of Metal Oxide Films for CMOS-Integrated Gas Sensors Journal Article

In: Sensors, vol. 15, no. 4, pp. 7206–7227, 2015.

Links | BibTeX

84.

Lado Filipovic; Anderson P. Singulani; Frederic Roger; Sara Carniello; Siegfried Selberherr

Intrinsic Stress Analysis of Tungsten-Lined Open TSVs Journal Article

In: Microelectronics Reliability, vol. 55, no. 9-10, pp. 1843–1848, 2015.

Links | BibTeX

83.

Lado Filipovic; Siegfried Selberherr

The Effects of Etching and Deposition on the Performance and Stress Evolution of Open Through Silicon Vias Journal Article

In: Microelectronics Reliability, vol. 54, no. 9-10, pp. 1953–1958, 2014.

Links | BibTeX

82.

Lado Filipovic; Siegfried Selberherr; G. C. Mutinati; Elise Brunet; Stephan Seinhauer; Anton Köck; Jordi Teva; J. Kraft; Joerg Siegert; F. Schrank

Methods of Simulating Thin Film Deposition Using Spray Pyrolysis Techniques Journal Article

In: Microelectronic Engineering, vol. 117, pp. 57–66, 2014.

Links | BibTeX

81.

Lado Filipovic; Siegfried Selberherr; G. C. Mutinati; E. Brunet; S. Steinhauer; Anton Köck; Jordi Teva; J. Kraft; Joerg Siegert; F. Schrank; Christian Gspan; Werner Grogger

Modeling the Growth of Tin Dioxide using Spray Pyrolysis Deposition for Gas Sensor Applications Journal Article

In: IEEE Transactions on Semiconductor Manufacturing, vol. 27, no. 2, pp. 269–277, 2014.

Links | BibTeX

80.

Lado Filipovic; Siegfried Selberherr

A Method for Simulating Atomic Force Microscope Nanolithography in the Level Set Framework Journal Article

In: Microelectronic Engineering, vol. 107, pp. 23–32, 2013.

Links | BibTeX

79.

Lado Filipovic; Siegfried Selberherr; G. C. Mutinati; Elise Brunet; Stephan Seinhauer; Anton Köck; Jordi Teva; J. Kraft; Joerg Siegert; F. Schrank; Christian Gspan; Werner Grogger

A Method for Simulating Spray Pyrolysis Deposition in the Level Set Framework Journal Article

In: Engineering Letters, vol. 21, no. 4, pp. 224–240, 2013, (invited).

Links | BibTeX

Books

78.

Lado Filipovic; Tibor Grasser (Ed.)

Miniaturized Transistors, Volume II Book

MDPI, 2022, ISBN: 978-3-0365-4169-3.

Links | BibTeX

77.

Lado Filipovic; Tibor Grasser (Ed.)

Miniaturized Transistors Book

MDPI, 2019, ISBN: 978-3-03921-010-7.

Links | BibTeX

Book Chapters

76.

Lado Filipovic; Siegfried Selberherr

Electro-Thermo-Mechanical Simulation of Semiconductor Metal Oxide Gas Sensors Book Chapters

2021, (invited).

Links | BibTeX

75.

Tobias Reiter; Xaver Klemenschits; Lado Filipovic

Impact of High-Aspect-Ratio Etching Damage on Selective Epitaxial Silicon Growth in 3D NAND Flash Memory Book Chapters

2021.

Links | BibTeX

74.

Raffaele Alberto Coppeta; Ayoub Lahlalia; Darjan Kozic; Rene Hammer; Johann Riedler; Gregor Toschkoff; Anderson P. Singulani; Zeeshan Ali; Martin Sagmeister; Sara Carniello; Siegfried Selberherr; Lado Filipovic

Electro-Thermal-Mechanical Modeling of Gas Sensor Hotplates Book Chapters

2020.

Links | BibTeX

73.

Xaver Klemenschits; Siegfried Selberherr; Lado Filipovic

Modeling of Gate Stack Patterning for Advanced Technology Nodes: A Review Book Chapters

2019, (invited).

Links | BibTeX

72.

Lado Filipovic; Ayoub Lahlalia

System-on-Chip Sensor Integration in Advanced CMOS Technology Book Chapters

2018, (invited).

Links | BibTeX

71.

Xaver Klemenschits; Siegfried Selberherr; Lado Filipovic

Unified Feature Scale Model for Etching in SF6 and Cl Plasma Chemistries Book Chapters

2018.

Links | BibTeX

70.

Paul Manstetten; Lado Filipovic; Andreas Hössinger; Josef Weinbub; Siegfried Selberherr

Using One-Dimensional Radiosity to Model Neutral Particle Flux in High Aspect Ratio Holes Book Chapters

2016.

Links | BibTeX

69.

Lado Filipovic; Siegfried Selberherr

Stress Considerations in Thin Films for CMOS-Integrated Gas Sensors Book Chapters

2015.

Links | BibTeX

68.

Lado Filipovic; Siegfried Selberherr; Giorgio C. Mutinati; Elise Brunet; S. Steinhauer; Anton Köck; Jordi Teva; J. Kraft; Joerg Siegert; F. Schrank; Christian Gspan; Werner Grogger

Modeling and Analysis of Spray Pyrolysis Deposited SnO2 Films for Gas Sensors Book Chapters

2014.

Links | BibTeX

67.

Lado Filipovic; Siegfried Selberherr

A Monte Carlo Simulator for Non-contact Mode Atomic Force Microscopy Book Chapters

2012.

Links | BibTeX

66.

Lado Filipovic; Siegfried Selberherr

A Two-Dimensional Lorentzian Distribution for an Atomic Force Microscopy Simulator Book Chapters

2012.

Links | BibTeX

65.

Josef Weinbub; Karl Rupp; Lado Filipovic; Alexander Makarov; Siegfried Selberherr

Towards a Free Open Source Process and Device Simulation Framework Book Chapters

2012.

Links | BibTeX

Conference Proceedings

64.

Josip Bobinac; Tobias Reiter; Julius Piso; Xaver Klemenschits; Oskar Baumgartner; Zlatan Stanojevic; Gerhard Stroff; Markus Karner; Lado Filipovic

Impact of Mask Tapering on SF₆/O₂ Plasma Etching Conference Proceedings

2022.

BibTeX

63.

Laura Gollner; Robin Steiner; Lado Filipovic

Study of Phonon-limited Electron Transport in Monolayer MoS₂ Conference Proceedings

2022.

BibTeX

62.

Lado Filipovic

Reliability and Stability of MEMS Microheaters for Gas Sensors Conference Proceedings

2021.

Links | BibTeX

61.

Lado Filipovic; Xaver Klemenschits

Fast Model for Deposition in Trenches using Geometric Advection Conference Proceedings

2021, (Talk: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Dallas, Texas (USA); 2021-09-27 -- 2021-09-29).

Links | BibTeX

60.

Xaver Klemenschits; Siegfried Selberherr; Lado Filipovic

Combined Process Simulation and Emulation of an SRAM Cell of the 5nm Technology Node Conference Proceedings

2021, (Talk: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Dallas, Texas (USA); 2021-09-27 -- 2021-09-29).

Links | BibTeX

59.

Lado Filipovic; Siegfried Selberherr

Gas Sensing with Two-Dimensional Materials Beyond Graphene Conference Proceedings

2021, (invited; Talk: International Conference on Microelectronics (MIEL), Nis, Serbia; 2021-09-12 -- 2021-09-14).

Links | BibTeX

58.

Tobias Reiter; Xaver Klemenschits; Lado Filipovic

Impact of High-Aspect-Ratio Etching Damage on Selective Epitaxial Silicon Growth in 3D NAND Flash Memory Conference Proceedings

2021, (Poster: Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS), Caen, France; 2021-09-01 -- 2021-09-03).

Links | BibTeX

57.

Lado Filipovic

Modeling and Simulation of ALD in a Level Set Framework Conference Proceedings

2021, (invited; Talk: EFDS Workshop on Simulation for ALD, virtual; 2021-03-25).

Links | BibTeX

56.

Lado Filipovic

Electromigration Model for Platinum Hotplates Conference Proceedings

2020, (Talk: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Kobe, Japan - virtual; 2020-09-23 -- 2020-10-06).

Links | BibTeX

55.

Xaver Klemenschits; Siegfried Selberherr; Lado Filipovic

Geometric Advection Algorithm for Process Emulation Conference Proceedings

2020, (Talk: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Kobe, Japan - virtual; 2020-09-23 -- 2020-10-06).

Links | BibTeX

54.

Lado Filipovic; Siegfried Selberherr

Integration of Gas Sensors with CMOS Technology Conference Proceedings

2020, (invited; Talk: IEEE Electron Devices Technology and Manufacturing Conference (EDTM), Penang, Malaysia - virtual; 2020-03-16 -- 2020-03-18).

Links | BibTeX

53.

Lado Filipovic; Siegfried Selberherr

Granularity Effects in Electromigration Conference Proceedings

2020, (invited; Talk: IEEE Latin America Electron Devices Conference (LAEDC), San Jose, Costa Rica; 2020-02-25 -- 2020-02-28).

Links | BibTeX

52.

Lado Filipovic; Siegfried Selberherr

CMOS-Compatible Gas Sensors Conference Proceedings

2019, (invited; Talk: International Conference on Microelectronics (MIEL), Nis, Serbia; 2019-09-16 -- 2019-09-18).

Links | BibTeX

51.

Lado Filipovic

Modeling and Simulation of Atomic Layer Deposition Conference Proceedings

2019, (Talk: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Udine, Italy; 2019-09-04 -- 2019-09-06).

Links | BibTeX

50.

Xaver Klemenschits; Paul Manstetten; Lado Filipovic; Siegfried Selberherr

Process Simulation in the Browser: Porting ViennaTS using WebAssembly Conference Proceedings

2019, (Talk: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Udine, Italy; 2019-09-04 -- 2019-09-06).

Links | BibTeX

49.

Lado Filipovic; Roberto Orio

Electromigration in Nano-Interconnects Conference Proceedings

2019, (invited; Talk: Workshop on High Performance TCAD (WHPTCAD), Chicago, IL, USA; 2019-05-24 -- 2019-05-25).

Links | BibTeX

48.

Xaver Klemenschits; Siegfried Selberherr; Lado Filipovic

Fast Volume Evaluation on Sparse Level Sets Conference Proceedings

2019, (Poster: International Workshop on Computational Nanotechnology (IWCN), Chicago, IL, USA; 2019-05-20 -- 2019-05-24).

Links | BibTeX

47.

Siegfried Selberherr; Lado Filipovic

CMOS Compatible Gas Sensors Conference Proceedings

2019, (invited; Talk: International Conference on Materials Science and Engineering, San Francisco, CA, USA; 2019-02-18 -- 2019-02-20).

Links | BibTeX

46.

Ayoub Lahlalia; Olivier Le Neel; Ravi Shankar; Siegfried Selberherr; Lado Filipovic

Enhanced Sensing Performance of Integrated Gas Sensor Devices Conference Proceedings

2018, (Poster: EUROSENSORS, Graz, Austria; 2018-09-09 -- 2018-09-12).

Links | BibTeX

45.

Lado Filipovic; Ayoub Lahlalia; Siegfried Selberherr

System-on-Chip Sensor Integration in Advanced CMOS Technology Conference Proceedings

2018, (invited; Talk: 233textsuperscriptrd ECS Meeting (ECS), Seattle, Washington, USA; 2018-05-13 -- 2018-05-17).

Links | BibTeX

44.

Lado Filipovic

CMOS-Compatible Semiconductor-Based Gas Sensors Conference Proceedings

2018, (invited; Talk: Emerging Technologies Communication Microsystems Optoelectronics Sensing (ETCMOS), Whistler, British Columbia, Canada; 2018-05-09 -- 2018-05-11).

Links | BibTeX

43.

Xaver Klemenschits; Siegfried Selberherr; Lado Filipovic

Unified Feature Scale Model for Etching in SF6 and Cl Plasma Chemistries Conference Proceedings

2018, (Poster: Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS), Granada, Spain; 2018-03-19 -- 2018-03-21).

Links | BibTeX

42.

Lado Filipovic; Roberto Orio

Modeling the Influence of Grains and Material Interfaces on Electromigration Conference Proceedings

2018, (Talk: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Austin, Texas, USA; 2018-09-24 -- 2018-09-26).

Links | BibTeX

41.

Lado Filipovic; R. L. Orio; Wolfhard Zisser; Siegfried Selberherr

Modeling Electromigration in Nanoscaled Copper Interconnects Conference Proceedings

2017, (Talk: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Kamakura, Japan; 2017-09-07 -- 2017-09-09).

Links | BibTeX

40.

Johann Cervenka; Lado Filipovic

Numerical Aspects of the Deterministic Solution of the Wigner Equation Conference Proceedings

2017, (Poster: International Wigner Workshop (IW2), Low Wood Bay, Lake District, UK; 2017-06-05).

Links | BibTeX

39.

Paul Manstetten; Lado Filipovic; Andreas Hössinger; Josef Weinbub; Siegfried Selberherr

Using One-Dimensional Radiosity to Model Neutral Flux in Convex High Aspect Ratio Structures Conference Proceedings

2016, (Poster: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Nürnberg, Deutschland; 2016-09-06 -- 2016-09-08).

Links | BibTeX

38.

Lado Filipovic; Siegfried Selberherr

Effects of the Deposition Process Variation on the Performance of Open TSVs Conference Proceedings

2016, (Poster: IEEE Electronic Components and Technology Conference (ECTC), Las Vegas, NV, USA; 2016-05-31 -- 2016-06-03).

Links | BibTeX

37.

Lado Filipovic; Anderson P. Singulani; Frederic Roger; Sara Carniello; Siegfried Selberherr

Impact of Across-Wafer Variation on the Electrical Performance of TSVs Conference Proceedings

2016, (Talk: IEEE International Interconnect Technology Conference (IITC), San Jose, CA, USA; 2016-05-23 -- 2016-05-26).

Links | BibTeX

36.

Lado Filipovic; Siegfried Selberherr

Modeling the Deposition and Stress Generation in Thin Films for CMOS-Integrated Gas Sensors Conference Proceedings

2016, (invited; Talk: World Congress of Smart Materials (WCSM), Singapore; 2016-03-04 -- 2016-03-06).

Links | BibTeX

35.

Paul Manstetten; Lado Filipovic; Andreas Hössinger; Josef Weinbub; Siegfried Selberherr

Modeling Neutral Particle Flux in High Aspect Ratio Holes using a One-Dimensional Radiosity Approach Conference Proceedings

2016, (Talk: Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS), Wien; 2016-01-25 -- 2016-01-27).

Links | BibTeX

34.

Lado Filipovic; Siegfried Selberherr

Processing of Integrated Gas Sensor Devices Conference Proceedings

2015, (invited; Talk: IEEE International Technical Conference of IEEE Region 10 (TENCON), Macau, China; 2015-11-01 -- 2015-11-04).

Links | BibTeX

33.

Lado Filipovic; Anderson P. Singulani; Frederic Roger; Sara Carniello; Siegfried Selberherr

Intrinsic Stress Analysis of Tungsten-Lined Open TSVs Conference Proceedings

2015, (Talk: European Symposium on Reliability of Electron Devices, Failure Physics and Analysis (ESREF), Toulouse, France; 2015-10-05 -- 2015-10-09).

Links | BibTeX

32.

Frederic Roger; Anderson P. Singulani; Sara Carniello; Lado Filipovic; Siegfried Selberherr

Global Statistical Methodology for the Analysis of Equipment Parameter Effects on TSV Formation Conference Proceedings

2015, (Talk: International Workshop on CMOS Variability (VARI), Salvador, Brazil; 2015-09-01 -- 2015-09-04).

Links | BibTeX

31.

Lado Filipovic; Siegfried Selberherr

Stress in Three-Dimensionally Integrated Sensor Systems Conference Proceedings

2015, (invited; Talk: International Conference on Materials for Advanced Technologies(ICMAT), Singapore; 2015-06-28 -- 2015-07-03).

Links | BibTeX

30.

Lado Filipovic; Siegfried Selberherr

Stress Considerations in Thin Films for CMOS-Integrated Gas Sensors Conference Proceedings

2015, (Talk: Meeting of the Electrochemical Society (ECS), Chicago, Illinois, USA; 2015-05-24 -- 2015-05-28).

Links | BibTeX

29.

Lado Filipovic; Siegfried Selberherr

Kinetics of Droplet Motion During Spray Pyrolysis Conference Proceedings

2015, (invited; Talk: Energy-Materials-Nanotechnology Meeting on Droplets (EMN), Phuket, Thailand; 2015-05-08 -- 2015-05-11).

Links | BibTeX

28.

Lado Filipovic; Siegfried Selberherr

About Processes and Performance of Integrated Gas Sensor Components Conference Proceedings

2014, (invited; Talk: Energy-Materials-Nanotechnology Fall Meeting (EMN), Orlando, USA; 2014-11-22 -- 2014-11-25).

Links | BibTeX

27.

Lado Filipovic; Siegfried Selberherr

Spray Pyrolysis Deposition for Gas Sensor Integration in the Backend of Standard CMOS Processes Conference Proceedings

2014, (invited; Talk: International Conference on Solid State and Integrated Circuit Technology (ICSICT), Guilin, China; 2014-10-28 -- 2014-10-31).

Links | BibTeX

26.

Lado Filipovic; Siegfried Selberherr

Stress Considerations for System-on-Chip Gas Sensor Integration in CMOS Technology Conference Proceedings

2014, (Talk: International Workshop on Stress-Induced Phenomena in Microelectronics, Austin, TX, USA; 2014-10-15 -- 2014-10-17).

Links | BibTeX

25.

Lado Filipovic; Siegfried Selberherr

The Effects of Etching and Deposition on the Performance and Stress Evolution of Open Through Silicon Vias Conference Proceedings

2014, (Talk: European Symposium on Reliability of Electron Devices, Failure Physics and Analysis (ESREF), Berlin, Germany; 2014-09-29 -- 2014-10-02).

Links | BibTeX

24.

Lado Filipovic; Florian Rudolf; Eberhard Baer; P. Evanschitzky; J. Lorenz; Frederic Roger; Anderson P. Singulani; R. Minixhofer; Siegfried Selberherr

Three-Dimensional Simulation for the Reliability and Electrical Performance of Through-Silicon Vias Conference Proceedings

2014, (Talk: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Yokohama, Japan; 2014-09-09 -- 2014-09-11).

Links | BibTeX

23.

Lado Filipovic; Roberto Orio; Siegfried Selberherr

Effects of Sidewall Scallops on the Performance and Reliability of Filled Copper and Open Tungsten TSVs Conference Proceedings

2014, (Talk: IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA), Singapore, Singapore; 2014-06-30 -- 2014-07-04).

Links | BibTeX

22.

Lado Filipovic; Roberto Orio; Siegfried Selberherr; Anderson P. Singulani; Frederic Roger; R. Minixhofer

Effects of Sidewall Scallops on Open Tungsten TSVs Conference Proceedings

2014, (Talk: International Reliability Physics Symposium (IRPS), Waikoloa, Hawaii, USA; 2014-06-01 -- 2014-06-05).

Links | BibTeX

21.

Lado Filipovic; Roberto Orio; Siegfried Selberherr

Process and Reliability of SF6/O2 Plasma Etched Copper TSVs Conference Proceedings

2014, (Talk: International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), Ghent, Belgium; 2014-04-07 -- 2014-04-09).

Links | BibTeX

20.

Eberhard Baer; P. Evanschitzky; J. Lorenz; Frederic Roger; R. Minixhofer; Lado Filipovic; Roberto Orio; Siegfried Selberherr

Coupled Simulation to Determine Across Wafer Variations for Electrical and Reliability Parameters of Through-Silicon VIAs Conference Proceedings

2014, (Talk: European Workshop on Materials for Advanced Metallization (MAM), Chemnitz, Germany; 2014-03-02 -- 2014-03-05).

Links | BibTeX

19.

Lado Filipovic; Roberto Orio; Siegfried Selberherr

Process and Performance of Copper TSVs Conference Proceedings

2014, (Talk: Workshop of the Thematic Network on Silicon On Insulator Technology, Devices and Circuits (EUROSOI), Tarragona, Spain; 2014-01-27 -- 2014-01-29).

Links | BibTeX

18.

Lado Filipovic; Siegfried Selberherr; G. C. Mutinati; E. Brunet; S. Steinhauer; Anton Köck; Jordi Teva; J. Kraft; Joerg Siegert; F. Schrank; Christian Gspan; Werner Grogger

Modeling the Growth of Thin SnO2 Films using Spray Pyrolysis Deposition Conference Proceedings

2013, (Poster: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Glasgow, Scotland, United Kingdom; 2013-09-03 -- 2013-09-05).

Links | BibTeX

17.

Lado Filipovic; Siegfried Selberherr; G. C. Mutinati; E. Brunet; S. Steinhauer; Anton Köck; Jordi Teva; J. Kraft; Joerg Siegert; F. Schrank

Modeling Spray Pyrolysis Deposition Conference Proceedings

2013, (Talk: World Congress on Engineering (WCE), London, UK; 2013-07-03 -- 2013-07-05).

Links | BibTeX

16.

Anderson P. Singulani; Hajdin Ceric; Lado Filipovic; Erasmus Langer

Impact of Bosch Scallops Dimensions on Stress of an Open Through Silicon Via Technology Conference Proceedings

2013, (Talk: International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, Poland; 2013-04-14 -- 2013-04-17).

Links | BibTeX

15.

Lado Filipovic; Siegfried Selberherr

Simulations of Local Oxidation Nanolithography by AFM Based on the Generated Electric Field Conference Proceedings

2012, (Talk: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Denver, CO, USA; 2012-09-05 -- 2012-09-07).

Links | BibTeX

14.

Lado Filipovic; Siegfried Selberherr

Electric Field Based Simulations of Local Oxidation Nanolithography using Atomic Force Microscopy in a Level Set Environment Conference Proceedings

2012, (Talk: Intl. Symposium on Microelectronics Technology and Devices (SBMicro), Brasilia, Brazil; 2012-08-30 -- 2012-09-02).

Links | BibTeX

13.

Lado Filipovic; Siegfried Selberherr

Simulation of Silicon Nanopatterning Using nc-AFM Conference Proceedings

2012, (Poster: International Conference on non-contact Atomic Force Microscopy, Cesky Krumlov; 2012-07-01 -- 2012-07-05).

Links | BibTeX

12.

Josef Weinbub; Karl Rupp; Lado Filipovic; Alexander Makarov; Siegfried Selberherr

Towards a Free Open Source Process and Device Simulation Framework Conference Proceedings

2012, (Poster: International Workshop on Computational Electronics (IWCE), Madison, WI, USA; 2012-05-22 -- 2012-05-25).

Links | BibTeX

11.

Lado Filipovic; Siegfried Selberherr

A Level Set Simulator for Nanooxidation using Non-Contact Atomic Force Microscopy Conference Proceedings

2011, (Talk: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Osaka, Japan; 2011-09-08 -- 2011-09-10).

Links | BibTeX

10.

Lado Filipovic; Siegfried Selberherr

A Two-Dimensional Lorentzian Distribution for an Atomic Force Microscopy Simulator Conference Proceedings

2011, (Talk: Seminar on Monte Carlo Methods (MCM), Borovets; 2011-08-29 -- 2011-09-02).

Links | BibTeX

9.

Lado Filipovic; Mihail Nedjalkov; Siegfried Selberherr

A Monte Carlo Simulator for Non-Contact Atomic Force Microscopy Conference Proceedings

2011, (Talk: International Conference on Large-Scale Scientific Computations (LSSC), Sozopol, Bulgaria; 2011-06-06 -- 2011-06-10).

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8.

Lado Filipovic; Hajdin Ceric; Johann Cervenka; Siegfried Selberherr

A Simulator for Local Anodic Oxidation of Silicon Surfaces Conference Proceedings

2011, (Talk: IEEE Canadian Conference on Electrical and Computer Engineering (CCECE), Niagara Falls, Canada; 2011-05-08 -- 2011-05-11).

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7.

Lado Filipovic; Otmar Ertl; Siegfried Selberherr

Parallelization Strategy for Hierarchical Run Length Encoded Data Structures Conference Proceedings

2011, (Talk: IASTED International Conference on Parallel and Distributed Computing and Networks (PDCN 2011), Innsbruck; 2011-02-15 -- 2011-02-17).

Links | BibTeX

6.

Otmar Ertl; Lado Filipovic; Siegfried Selberherr

Three-Dimensional Simulation of Focused Ion Beam Processing Using the Level Set Method Conference Proceedings

2010, (Talk: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Bologna, Italy; 2010-09-06 -- 2010-09-08).

Links | BibTeX

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